牛津仪器Jupiter XR 原子力显微镜

Jupiter XR 是一款适合大尺寸品的原子力显微镜。通过它,用户可以实现在一台扫描器上进行高速成像和大范围扫描。Jupiter原子力显微镜可用于200mm晶圆样品的扫描,提供更高的分辨率、更快的测量速度、更简便的用户体验,并且在学术研究和工业研发领域都具有出色的通用性。

与同类大样品原子力显微镜相比,具有更高的分辨率

扫描范围可达100 μm,其速度比大多数原子力显微镜快5-20倍

从设置到获得结果,每一步都更简便、更快速

模块式设计更具灵活性,可以满足多种需求

牛津仪器Jupiter XR 原子力显微镜特点和优势

更好的性能

Higher resolution than any other large-sample AFM

Extended-range scanner is 5-20× faster than most AFMs and features large 100 μm X-Y & 12 μm Z range

Exclusive blueDrive™ Tapping Mode gives more reproducible results and simplifies operation

更简便的用户体验

Fully-motorized laser and detector setup eliminates manual adjustment of knobs

Fully-addressable, high-speed stage rapidly reaches any point on 200 mm samples

Sharp top-view optics help you easily locate your precise region of interest

Go from atoms to large 100-μm scans and use any imaging mode, all with the single XR scanner

满足多种科研需求

Support for a full range of imaging modes

Modular design makes it fast and simple to add accessories and future upgrades

Flexible software makes routine measurements easy while enabling advanced research

牛津仪器Jupiter XR 原子力显微镜操作模式

支持的操作模式

Contact mode

DART PFM

Dual AC

Dual AC Resonance Tracking (DART)

Electrostatic Force Microscopy (EFM)

Force curves

Force Mapping Mode (force volume)

Force modulation

Frequency modulation

Kelvin Probe Force Microscopy (KPFM)

Lateral Force Mode (LFM)

Loss tangent imaging

Magnetic Force Microscopy (MFM)

Nanolithography

Nanomanipulation

Phase imaging

Piezoresponse Force Microscopy (PFM)

Switching spectroscopy PFM

Tapping mode (AC mode)

Tapping mode with digital Q control

Vector PFM

包括以下模式,因为Jupiter XR配有blueDrive

AM-FM Viscoelastic Mapping Mode

Contact Resonance Viscoelastic Mapping Mode

可选的操作模式

Conductive AFM (CAFM) with ORCA™ and Eclipse™ Mode

Current mapping with Fast Force Mapping

Electrochemical Strain Microscopy (ESM)

Fast Force Mapping Mode

High voltage PFM

Nanoscale Time Dependent Dielectric Breakdown (nanoTDDB)

Scanning Microwave Impedance Microscopy (sMIM)

Scanning Tunneling Microscopy (STM)